VERTICAL REACTOR FOR OBTAINING SILANE AND METHOD FOR CONTINUOUS OBTAINING SILANE USING THE SAME

摘要

PURPOSE: In one reactor the stoichiometric flow is guaranteed. It can switch into the mono silane gas by altogether reacting the silicon halides, the continuous recovering method of silane for manufacture vertical reactor and silane using the same. CONSTITUTION: The silane for manufacture vertical reactor. With the first raw material of the liquid including the metal hydride. The second raw material of the weather including the silicon halides. The reactive part(110) including a plurality of active zones reacting. The first inlet which is formed in the upper one side of the reactive part, and flows in the first raw material as the reactive part(120).