MFC READOUT BOX AND METHOD FOR CORRECTING FLOW USING THEREFOR

摘要

PURPOSE: An MFC readout box and a flow rate correction method using the same are provided to minimize the deviation of a flow rate control by calculating service voltage for controlling a flow rate. CONSTITUTION: An MFC readout box(100) comprises a storage unit(140), an input unit(110), a calculation unit(150), and a controller(160). The storage unit stores correction information. A flow rate setting value is input to the input unit. The calculation unit calculates service voltage applied to the input flow rate setting value based on the correction information. The controller supplies the service voltage from the calculation unit to a mass flow rate controller.