A method of cutting an object along two different directions further using an elastic sheet for dividing the object

摘要

A laser beam machining method capable of cutting a work (1) without producing a fusing and a cracking out of a first and a second predetermined cutting lines (5) on the surface (3) of the work (1), wherein a pulse laser beam (L) is radiated on the predetermined cut lines (5) on the surface (3) of the work (1) with a condensed point (P) aligned to the inside of the work (1), and a modified area is formed inside the work (1) along the predetermined determined cut lines (5) by moving the condensed point (P) along the predetermined cut lines (5), wherein the second cutting line (5) extends in a second direction which crosses the first direction, whereby the work (1) can be cut with a rather small force by cracking the work (1) along the predetermined cut lines (5) starting from the modified area by applying stress to the object (1) through a sheet having elastic characteristics attached to the back surface of the object (1).