| 摘要 |
Curing systems (20) are provided that include a planar support surface (22) for supporting a substrate (24) having at least one layer (26) deposited thereon, at least one curing device (28) for curing the at least one deposited layer, and a control system (32) for controlling the overall curing process. The curing device includes at least one laser (40), a lens module (42), and an optional modulator (44). During curing, the beam of light emitted from the laser may be directed onto the deposited layer by 1) controlling the position of an X-Y beam deflecting module to direct the focused beam of laser light onto a desired illumination area of the deposited layer; 2) controlling the position of the laser via an X-Y table (50), or 3) controlling the position of the substrate via an X-Y table (54). |
