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发明名称
RAPID THERMAL PROCESSING SYSTEM FOR INTEGRATED CIRCUITS
摘要
申请公布号
EP1382058(B1)
申请公布日期
2010.11.17
申请号
EP20020718446
申请日期
2002.04.03
申请人
MATTSON TECHNOLOGY INC.
发明人
TAY, SING-PIN;HU, YAO, ZHI;HAUF, MARKUS
分类号
H01L21/00;H01L21/31;H01L21/26
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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