Resist Lower Layer Film and a Method for Forming a Pattern,申请号KR20040037711-传众专利搜索

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发明名称	Resist Lower Layer Film and a Method for Forming a Pattern
摘要
申请公布号	KR100994899(B1)	申请公布日期	2010.11.16
申请号	KR20040037711	申请日期	2004.05.27
申请人		发明人
分类号	G03F7/004;G03F7/11;G03C1/76;G03F7/038;G03F7/095;G03F7/26;G03F7/36;G03F7/40;H01L21/027	主分类号	G03F7/004
代理机构		代理人
主权项
地址

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