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发明名称
Imprint lithography apparatus and methods
摘要
An imprint lithography apparatus including a service station.
申请公布号
US7832416(B2)
申请公布日期
2010.11.16
申请号
US20060539936
申请日期
2006.10.10
申请人
HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P.
发明人
WANG SHIH-YUAN;WU WEI;YU ZHAONING
分类号
B08B3/04
主分类号
B08B3/04
代理机构
代理人
主权项
地址
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