发明名称 |
Semiconductor device including a pressure sensor |
摘要 |
A semiconductor device includes a first cavity within a semiconductor substrate and a second cavity within the semiconductor substrate. The second cavity is open to an atmosphere and defines a first lamella between the first cavity and the second cavity. The semiconductor device includes a first sense element configured for sensing a pressure on the first lamella.
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申请公布号 |
US7832279(B2) |
申请公布日期 |
2010.11.16 |
申请号 |
US20080208897 |
申请日期 |
2008.09.11 |
申请人 |
INFINEON TECHNOLOGIES AG |
发明人 |
KAUTZSCH THORALF;BINDER BORIS;MEINHOLD DIRK;ROSAM BEN;FOESTE BERND;THAMM ANDREAS |
分类号 |
G01L7/00 |
主分类号 |
G01L7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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