发明名称 |
Support structures for free-standing electromechanical devices |
摘要 |
A microelectromechanical (MEMS) device includes a functional layer including a first material, a deformable layer including a second material different from the first material, and a connecting element including the first material. The connecting element is mechanically coupled to the deformable layer and the functional layer. The connecting element and the deformable layer form an interface between the first material and the second material. The interface is spaced from the functional layer.
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申请公布号 |
US7835061(B2) |
申请公布日期 |
2010.11.16 |
申请号 |
US20060476317 |
申请日期 |
2006.06.28 |
申请人 |
QUALCOMM MEMS TECHNOLOGIES, INC. |
发明人 |
KOGUT LIOR;TUNG MING-HAU;ARBUCKLE BRIAN |
分类号 |
G02B26/00 |
主分类号 |
G02B26/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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