发明名称 Antifuse elements
摘要 An antifuse element (102, 152, 252, 302, 352, 402, 602, 652, 702) includes a substrate material (101) having an active area (106) formed in an upper surface, a gate electrode (104) having at least a portion positioned above the active area (106), and a gate oxide layer (110) disposed between the gate electrode (104) and the active area (106). The gate oxide layer (110) includes one of a gate oxide dip (128) or a gate oxide undercut (614). During operation a voltage applied between the gate electrode (104) and the active area (106) creates a current path through the gate oxide layer (110) and a rupture of the gate oxide layer (110) in a rupture region (130). The rupture region (130) is defined by the oxide structure and the gate oxide dip (128) or the gate oxide undercut (614).
申请公布号 US7834417(B2) 申请公布日期 2010.11.16
申请号 US20090413078 申请日期 2009.03.27
申请人 FREESCALE SEMICONDUCTOR, INC. 发明人 MIN WON GI;BAIRD ROBERT W.;LEE GORDON P.;ZUO JIANG-KAI
分类号 H01L23/52;H01L23/62 主分类号 H01L23/52
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