发明名称 SEMICONDUCTOR CONSTRUCTIONS, MEMORY ARRAYS, ELECTRONIC SYSTEMS, AND METHODS OF FORMING SEMICONDUCTOR CONSTRUCTIONS
摘要 The invention includes semiconductor constructions having trenched isolation regions. The trenches of the trenched isolation regions can include narrow bottom portions and upper wide portions over the bottom portions. Electrically insulative material can fill the upper wide portions while leaving voids within the narrow bottom portions. The bottom portions can have substantially vertical sidewalls, and can join to the upper portions at steps which extend substantially perpendicularly from the sidewalls. The trenched isolation regions can be incorporated into a memory array, and/or can be incorporated into an electronic system. The invention also includes methods of forming semiconductor constructions.
申请公布号 KR20100120316(A) 申请公布日期 2010.11.15
申请号 KR20107024149 申请日期 2006.07.10
申请人 MICRON TECHNOLOGY, INC. 发明人 SANDHU GURTEJ S.;DURCAN D. MARK
分类号 H01L21/76;H01L21/762 主分类号 H01L21/76
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