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发明名称
VERFAHREN ZUR INSPEKTION EINER PROBE UNTER VERWENDUNG UNTERSCHIEDLICHER INSPEKTIONSPARAMETER
摘要
申请公布号
AT487936(T)
申请公布日期
2010.11.15
申请号
AT20040788621T
申请日期
2004.09.03
申请人
KLA-TENCOR CORPORATION
发明人
LANGE, STEVE;MARELLA, PAUL;CEGLIO, NAT;HWANG, SHIOW-HWEI;FU, TAO-YI
分类号
G01N21/95
主分类号
G01N21/95
代理机构
代理人
主权项
地址
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