换滤芯时不影响后研磨作业之晶圆研磨液产出结构,申请号TW099211456-传众专利搜索

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发明名称	换滤芯时不影响后研磨作业之晶圆研磨液产出结构
摘要
申请公布号	TWM392433	申请公布日期	2010.11.11
申请号	TW099211456	申请日期	2010.06.15
申请人	宸沅国际股份有限公司	发明人	黄怡文
分类号	H01L21/30	主分类号	H01L21/30
代理机构		代理人	林衍锋台北市中正区罗斯福路2段10号8楼
主权项	一种换滤芯时不影响后研磨作业之晶圆研磨液产出结构，主要由一混酸稀释晶圆研磨原液之混酸槽、至少一只滤除过大微粒之过滤器、及一储备并供应拌妥晶圆研磨液到晶圆研磨机之供应槽管接而成，其特征在于：该些过滤器不设于供应槽之供应槽输出管，而设于供应槽之供应槽输入管者。如申请专利范围第1项之一种换滤芯时不影响后研磨作业之晶圆研磨液产出结构，其中该过滤器滤芯孔径为6μ以至于1μ者。
地址	台北市大安区忠孝东路4段295号3楼

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