| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an aluminum nitride sintered compact suitable for use requiring high dimension precision and having high thermal conductivity, wherein chipping hardly occurs by intergranular fracture in processes such as cutting by a blade or a breaking and cracking treatment after scribe treatment. <P>SOLUTION: The aluminum nitride sintered compact comprises 0.1-0.5 mass% of a yttrium compound in terms of yttrium element, in which the percentage that yttrium nitride occupies in the yttrium compound is 5-30%, at least a part of the yttrium nitride exists in two-grain boundary of aluminum nitride crystal particles, and the relative density thereof is ≥98%. <P>COPYRIGHT: (C)2011,JPO&INPIT |
