| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a surface acoustic wave element, capable of efficiently, highly accurately and easily manufacturing a surface acoustic wave element. <P>SOLUTION: The method for manufacturing the surface acoustic wave element includes: (a) a substrate thickness reduction step of reducing the thickness of a piezoelectric substrate 10, by machining one principal surface 10b of the piezoelectric substrate 10; and (b) a bonding step of bonding a support substrate 14, having a smaller coefficient of linear expansion than that of the piezoelectric substrate 10 via a resin adhesive 12 to the piezoelectric substrate 10 having the reduced thickness. <P>COPYRIGHT: (C)2011,JPO&INPIT |
