发明名称 LIGHT IRRADIATION DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a structure so that maintenance of a light source part such as replacement of lamps and converging mirrors is easily performed, in a light irradiation device provided with 4 lamps. <P>SOLUTION: In the light irradiation device in which the four lamps are arranged so that they are vertexes of a rectangle, the light source part is divided into two units in which two lamps are made into a set, and each unit is provided with a drawing guide (guide rail). Then the two units are drawn out in the direction that they conflict each other (horizontal direction) on the horizontal plane. <P>COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2010256531(A) 申请公布日期 2010.11.11
申请号 JP20090105089 申请日期 2009.04.23
申请人 USHIO INC 发明人 SUZUKI KAZUYOSHI;SUZUKI KOTA
分类号 G03F7/20;F21S2/00;H01L21/027 主分类号 G03F7/20
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