| 摘要 |
PROBLEM TO BE SOLVED: To obtain a galvano scanner in which the magnetic path of a movable part is composed by permanent magnets only, inertia is reduced by making movable parts light, magnetic flux is increased by increasing the volume of permanent magnets, and a high acceleration is available by suppressing the increase in the electric current supplied to a coil. SOLUTION: The galvano scanner includes: a holding member 3 made of a resin, which has a back face shaped in a semicylindrical face 3b and holds a reflecting mirror 2 so that the center axis O of the semicylindrical face 3b is located at the anti-diagonal face of a reflecting mirror 2; the permanent magnets 5 provided as a unit with the holding member 3 and configuring the movable part together with the holding member; a base member 9 which supports the holding member 3 freely turnably around the center axis O; a core 7 disposed on the base member 9 so as to face the semicylindrical face 3b of the holding member 3; and a coil 8 fixed on the core 7 and drives the holding member 3 to turn around the center axis O by cooperating with the permanent magnets 5. The holding member 3 is made of a nonmagnetic resin material and the magnetic path of the movable part is composed by the permanent magnets 5 only. COPYRIGHT: (C)2011,JPO&INPIT
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