发明名称 SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME
摘要 A semiconductor device includes a transistor having a recessed gate, contact plugs formed in a region of a plurality of trenches, which are formed by recessing a semiconductor substrate. Further, a metal line and a source/drain region can be connected through the contact plug, so that on-current can be increased as much as an increased channel area.
申请公布号 US2010285648(A1) 申请公布日期 2010.11.11
申请号 US20100842638 申请日期 2010.07.23
申请人 HYNIX SEMICONDUCTOR INC. 发明人 KIM DAE SIK
分类号 H01L21/336 主分类号 H01L21/336
代理机构 代理人
主权项
地址