| 摘要 |
PROBLEM TO BE SOLVED: To provide an aligner apparatus holding the edge of a wafer and centering the wafer and aligning the angles of the notches of the wafer, including an infinite rotatable mechanism which is not limited by a rotating range, formed by eliminating cable and tubes from a rotating portion for reducing the tact time and the size. SOLUTION: A linking mechanism openably operating a holding mechanism holding the wafer (1) is formed, supported on a linking mechanism drive part driving the link mechanism via a bearing (14) so that only the holding mechanism and the linking mechanism can be rotated. COPYRIGHT: (C)2011,JPO&INPIT |
