摘要 |
The invention describes a microsphere with diameter from 0.1 to 50 micrometers, made of a material selected from the group consisting of: silicon, doped silicon, SixGe1-x wherein 0≦̸x≦̸1, and SixH1-x wherein 0.5≦̸x≦̸1, that is able to work as optical microcavity with resonating Mie modes for wavelengths from 1 to 160 micrometers, and a photonic sponge based on the above mentioned microspheres, that scatter light strongly in a wide range of wavelengths, namely from 1 to 160 micrometers. The manufacturing method is based on the decomposition of gaseous precursors by heating means. These microspheres are suitable for fabricating photonic devices like, for instance, photovoltaic cells, photodiodes, lasers and sensors.
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