VIBRATION CONTROL APPARATUS, VIBRATION CONTROL METHOD, EXPOSURE APPARATUS, AND DEVICE PRODUCTION METHOD

摘要

A vibration control apparatus suppresses vibrations of a structure affected by vibration. The vibration control apparatus is provided with a vibration-preventing apparatus (22) which supports the structure and suppresses vibration of less than or equal to a first amplitude from being transmitted in a predetermined vibration direction, and a vibration damping apparatus (26) which dampens, in the vibration direction, the vibration of the structure affected by vibration of a second amplitude higher than the first amplitude to vibration of less than or equal to the first amplitude.