| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a wafer transfer method and a wafer transfer device, which can prevent unintended drying of a semiconductor wafer in a housed state. <P>SOLUTION: The wafer transfer method houses a wafer Wf in a housing basket 3 to be transferred by a conveyor 1, wherein the wafer Wf to be transferred by the conveyor 1 in a direction different from a vertical direction is subjected to direction change by a direction converter 2 so that its in-plane direction goes along a vertical direction and also proceeds in the vertical direction downward after the change of proceeding direction, the wafer Wf is housed in the housing basket 3 which is arranged in a liquid Lq and is opened in a vertical upper portion. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
