摘要 |
PROBLEM TO BE SOLVED: To provide an electronic component which can suppress a leak current generated by field electron emission even when a high electrical field is applied on a dielectric of an ultrathin film, and thereby can reduce power consumption, and can prevent damage on an element by heat generation as much as possible. SOLUTION: A low-oxygen defect insulation film 1 is interposed between an internal electrode layer 2 and a dielectric ceramic layer 5. An oxygen defect concentration of the low-oxygen defect insulation film 1 is 1.0×10<SP>26</SP>m<SP>-3</SP>or less. A thickness of the low-oxygen defect insulation film 1 is 2.2 nm or more. COPYRIGHT: (C)2011,JPO&INPIT
|