发明名称 Method of manufacturing an image sensor having improved anti-reflective layer
摘要 In a method of manufacturing an image sensor, a photodiode may be formed in a light receiving region of a substrate having a first surface. A conductive wiring may be formed on the first surface of the substrate. After removing a portion of the substrate opposite to the first surface, an anti-reflective layer may be formed on a second surface of the substrate. The second surface may be opposite to the first surface. The anti-reflective layer and the light receiving region may be thermally treated to cure defects including dangling bonds in the substrate and to improve a refraction index of the anti-reflective layer. The image sensor may have an enhanced light transmittance and may produce high-definition images.
申请公布号 US2010285630(A1) 申请公布日期 2010.11.11
申请号 US20100662861 申请日期 2010.05.07
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 LEE YUN-KI
分类号 H01L31/18;H01L21/30 主分类号 H01L31/18
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