发明名称 EXTERNALLY REPLACEABLE VACUUM CHAMBER TO CHAMBER FLANGE SEAL
摘要 A chamber interface sealing assembly includes first and second chambers with respective first and second mating walls disposed adjacent each other. The first and second mating walls have respective through holes, which are aligned to form a passage interconnecting the first and second chambers. A first flange extends outwardly from the first mating wall and away from the passage. A second flange extends outwardly from the second mating wall and away from the passage. The first and second flanges define a circumferential concave groove therebetween. A close-loop gasket is disposed within the circumferential concave groove.
申请公布号 US2010283240(A1) 申请公布日期 2010.11.11
申请号 US20090435580 申请日期 2009.05.05
申请人 APPLIED MATERIALS, INC. 发明人 CEELEN HANS PETER THEODORUS
分类号 F16L19/025 主分类号 F16L19/025
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