| 发明名称 |
METHODS AND APPARATUSES TO ALIGN ENERGY BEAM TO ATOM PROBE SPECIMEN |
| 摘要 |
A method for aligning an energy beam to an object in an atom probe is disclosed. The method comprises monitoring at least one parameter indicative of an interaction between the energy beam and the object. A signal is generated in response to the interaction of the energy beam and the object. The signal is then used to effectuate control of the alignment of the energy beam to the object.
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| 申请公布号 |
US2010282964(A1) |
申请公布日期 |
2010.11.11 |
| 申请号 |
US20080676314 |
申请日期 |
2008.08.27 |
| 申请人 |
BUNTON JOSEPH HALE;OLSON JESSE D;ALVIS ROGER;LENZ DANIEL R;OLTMAN ED |
发明人 |
BUNTON JOSEPH HALE;OLSON JESSE D.;ALVIS ROGER;LENZ DANIEL R.;OLTMAN ED |
| 分类号 |
H01J49/26;H01J49/00 |
主分类号 |
H01J49/26 |
| 代理机构 |
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| 主权项 |
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