| 摘要 |
PROBLEM TO BE SOLVED: To provide suction and holding device and method and a carrying device and a carrying method for sucking and holding an object to be held or carried by a non-contact by using a suction holding terminal smaller than the object. SOLUTION: The suction and holding device sucks and holds the object to be held by a negative pressure generated at the center of the swirling current of a gas generated in a swirling-current generating chamber and the gas flowing out to the side from the end of the swirling-current generating chamber. The suction and holding device includes the suction holding terminal includes: the swirling-current generating chamber; and a suction holding surface opening a blow-off port for a suction for the swirling-current generating chamber. The suction and holding device further includes: an urging means applying an urging force in the direction approximately parallel with the suction holding surface to the object to be held at a position for being sucked and held at the suction holding terminal; and an engaging means engaging the object to be held against the urging force by the urging means. COPYRIGHT: (C)2011,JPO&INPIT |
