| 摘要 |
PROBLEM TO BE SOLVED: To provide a shape measuring method and a device or the like capable of measuring the shape of a measuring object with high measurement accuracy, even when having disturbance vibration or air fluctuation. SOLUTION: This shape measuring device includes: a branching device 6 for branching a coherent light flux 11 emitted from a light source 1, and irradiating a measuring object 7 and a reference mirror 8 therewith; a driving device 20 generating relative motion between the measuring object 7 and the reference mirror 8; a superimposing device 6 for forming an interference fringe by superimposing object light 12 reflected by the measuring object 7 on reference light 13 reflected by the reference mirror 8; an imaging device 10 for acquiring continuously-imaged data acquired by imaging the interference fringe continuously; and a calculation device 21 for calculating a three-dimensional shape of the measuring object 7 from the continuously imaged data. By modulating each frequency of the object light 12 and the reference light 13 by relative motion according to a Doppler effect, the calculation device 21 acquires a phase shift spectrum from a spectrum of a frequency difference between both lights, and calculates the three-dimensional shape of the measuring object 7 from the phase shift spectrum and the continuously imaged data. COPYRIGHT: (C)2011,JPO&INPIT
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