发明名称 ELECTRONIC DEVICE MANUFACTURING CHAMBER AND METHODS OF FORMING THE SAME
摘要 A non-polygon shaped, multi-piece chamber is provided. A non-polygon shaped, multi-piece chamber may include (1) a central piece having a first side and a second side, (2) a first side piece adapted to couple with the first side of the central piece, and (3) a second side piece adapted to couple with the second side of the central piece. The central piece, the first side piece, and the second side piece form a cylindrical overall shape when coupled together. Numerous other aspects are provided.
申请公布号 US2010281683(A1) 申请公布日期 2010.11.11
申请号 US20100840262 申请日期 2010.07.20
申请人 APPLIED MATERIALS, INC. 发明人 WHITE JOHN M.;VERPLANCKEN DONALD;KURITA SHINICHI
分类号 B23P19/00 主分类号 B23P19/00
代理机构 代理人
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