| 摘要 |
PROBLEM TO BE SOLVED: To provide a pressure sensor wherein the detection error of a pressure sensor chip is suppressed and the efficiency of assembling workability is improved. SOLUTION: The pressure sensor 1 includes a pressure sensor chip 2 (hereinafter to be referred to as "chip 2") for detecting the pressure of fluid, a package 4, a terminal 5, and a housing 8. The box-shaped package 4 contains the chip 2, wherein a pressure introduction hole 4c for introducing the pressure of fluid is arranged through the wall part. The housing 8 is formed of box-shaped first and second cases 11, 12 each having an open face by coupling them, while jointing both the open faces together, and contains the package 4. An internal bottom surface 11h of the first case 11 has a through-hole 11e arranged therethrough and communicating with the pressure introduction hole 4c and through which fluid flows in. The terminal 5 is electrically connected to the chip 2 and outputs a detection value outside the housing 8. A plurality of hole portions 5b are arranged through an end part of the terminal 5 which is exposed outside the package 4. The internal bottom surface 11h has a plurality of projections 11d, arranged through the hole portions 5b and swaged therein. COPYRIGHT: (C)2011,JPO&INPIT |
