发明名称 WIRE BONDING DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a structure allowing a pin-less pull test to be properly executed with a simple structure. <P>SOLUTION: A motor control device includes a thrust correction value setting part for setting a thrust correction value Fc of a linear motor, and a target thrust correction part for correcting a target thrust F by adding the thrust correction value Fc. When a subduction average amount difference Yave is larger than an upper-limit threshold Z in executing a pull test (step 7: Yes), thrust correction for adding a load change (K&times;Ymax) due to subduction to the target thrust F as a thrust correction value Fc to add the load change (K&times;Ymax) due to subduction to a pull test load Lt is executed (step 9), and the pull test load Lt is applied again (step 4). <P>COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2010258331(A) 申请公布日期 2010.11.11
申请号 JP20090108861 申请日期 2009.04.28
申请人 ULTRASONIC ENGINEERING CO LTD 发明人 MATSUBARA SHIRO
分类号 H01L21/60 主分类号 H01L21/60
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