| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a machining method homogeneously machining an edge portion of a workpiece, irrespective of the shape thereof, into a desired curved surface shape in a short machining time and a machining apparatus executing the machining method as well; to provide a substrate holding member preventing the decrease in supporting accuracy due to foreign matter adhering to the edge portion of a number of supporting projections; and to separately provide a manufacturing method easily manufacturing such a substrate holding member. <P>SOLUTION: The machining method grinds the workpiece 10a by bringing a number of abrasive grains into contact with the workpiece 10a, wherein edge portions 21, 23 of the workpiece 10a are brought into contact with an abrasive grain aggregate 31 comprising the number of abrasive grains and the workpiece 10a is vibrated to grind the edge portion 21 into the curved surface shape. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
