| 摘要 |
PROBLEM TO BE SOLVED: To provide a sample analysis method which enables the proper observation or analysis of a sample by suppressing the charge of the sample without forming a conductive film to the sample. SOLUTION: The sample analysis method is provided for analysis of the electrons emitted from the sample associated with the irradiation of the sample with radiation. The method includes a step of irradiating the sample with a neutral atomic beam or ion beam, and a step of irradiating the sample with radiation after the irradiation of the sample with the neutral atomic beam or ion beam and analyzing the electrons from the sample. By this sample analysis method, even if the observation surface of the sample is not coated with the conductive film, the occurrence of an abnormal analysis results associated with the charge of the sample can be avoided. COPYRIGHT: (C)2011,JPO&INPIT
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