| 摘要 |
Disclosed is an annealing apparatus using plasma, which anneals objective articles used in a variety of products such as semiconductors, flat panel displays (FPDs), flexible displays, solar cells, sensors, LEDs, and OLEDs. The annealing apparatus using plasma according to the present invention comprises: a plasma torch module in which a plasma torch for generating a plasma flame by an arc discharge is arranged to be movable relative to an objective article; and a stage on which the objective article to be heated by the flame of the plasma torch is loaded and conveyed. |
