发明名称 X-RAY SPATIAL MODULATION DEVICE AND X-RAY ALIGNER
摘要 <P>PROBLEM TO BE SOLVED: To provide an X-ray spatial modulation device which imposes fine intensity modulation of X-ray beam in a two-dimensional space by an electrical operation. <P>SOLUTION: The X-ray spatial modulation device 1 has: an X-ray modulation means 10 arrayed two-dimensionally with spin injection type magnetic domain wall movement elements (hereinafter, elements) 5 in which a magnetic domain wall, which is the boundary of magnetic domains of which magnetizing directions are mutually opposite, is moved by spin injection; an element selecting means 11 which selects an element 5 for moving the magnetic domain wall from elements 5 arrayed two-dimensionally; and a magnetic domain wall movement current injection means 12, which injects magnetic domain wall movement current for the magnetic domain wall movement to the element 5 selected by the element selecting means 11, to move the magnetic domain wall of the element 5. The X-ray spatial modulation device 1 controls the position of the magnetic domain wall of each element 5 by the element selecting means 11, and modulates the intensity distribution in the two-dimensional space of monochromatic circularly polarized X-ray beam B2 transmitted through the element 5, by changing the absorptivity of the element 5 to the monochromatic circularly polarized X-ray beam B2. <P>COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2010258379(A) 申请公布日期 2010.11.11
申请号 JP20090109914 申请日期 2009.04.28
申请人 NIPPON HOSO KYOKAI <NHK> 发明人 SATO SHIRO;FUNABASHI NOBUHIKO;AOSHIMA KENICHI;MACHIDA KENJI;MIYAMOTO YASUYOSHI;KAWAMURA KIICHI;KUGA ATSUSHI;SHIMIZU NAOKI
分类号 H01L21/027;G21K3/00;H01L29/82 主分类号 H01L21/027
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