| 摘要 |
PROBLEM TO BE SOLVED: To provide an XYθstage mechanism for efficiently performing maintenance work of a work table using a tension spring in a positioning mechanism and to provide an attaching and a detaching apparatus of tension springs. SOLUTION: The XYθstage mechanism is constituted of an alignment table 11 slide-freely supported at a base 10; position adjusting mechanisms (12-14) for positioning the alignment table 11 to the base 10 in X, Y, andθdirections; pressing mechanisms (16-19) for pressing the alignment table 11 to the side of a side surface part 11a in the direction of an X axis and fixing the alignment table 11 to a position positioned by the position adjusting mechanisms (12-14); and a maintenance tool 20 for removing a pressing force of the pressing mechanisms (16-19) to the alignment table 11 to set the alignment table 11 free relative to the base 10. COPYRIGHT: (C)2011,JPO&INPIT
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