| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a polishing sheet excellent in in-plane uniformity, requiring a short start-up time. <P>SOLUTION: The method of manufacturing the polishing sheet composed of a sheet-like foam includes the step of adjusting the thickness of the polishing sheet by application of sandpaper. The application of sandpaper to a polishing surface includes a first finish grinding and a second finish grinding. The first finish grinding is carried out by increasing the yarn count of the sandpaper. The yarn count of the sandpaper used for the second finish grinding is smaller than the yarn count of the sandpaper used finally in the first finish grinding. The grinding amount in the second finish grinding is ≥10 μm and ≤1,000 μm. <P>COPYRIGHT: (C)2011,JPO&INPIT |
