| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an acceleration sensor having high reliability. <P>SOLUTION: The acceleration sensor includes a fixed part, a weight part being displaceable in relation to the fixed part, a beam part of which the first end is connected to the fixed part and the second end to the weight part, a resistance element which is disposed in the beam part and the resistance value of which varies according to bending of the beam part, and a conductor layer which is provided for connecting the resistance value of the resistance element to an external circuit and which has a connection part connected electrically to the resistance element and disposed at a position where a stress impressed thereon due to the displacement of the weight part is smaller than that on the resistance element and has a wiring part which extends from the connection part and is disposed on a surface expanding to a thickness position different from that of the resistance element. <P>COPYRIGHT: (C)2011,JPO&INPIT |
