| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a crystal vibrator, capable of easily manufacturing the crystal vibrator in which one main surface of a vibrating portion has a curved convex portion, and reducing the manufacturing cost of the crystal vibrator. <P>SOLUTION: The manufacturing method includes: a crystal substrate recess forming step of providing a plurality of crystal substrate recesses and substrate internal wirings on a crystal wafer; a cover forming step of providing a plurality of covers on the other main surface used as a crystal substrate of the crystal wafer by using an inkjet method; a convex processing step of processing the other main surface of the crystal wafer having the covers formed thereon; an electrode forming step of providing an electrode on a portion to be the crystal substrate; a first joining step of joining the first wafer having the portion to be a plurality of first containers to the crystal wafer with the crystal substrate recesses toward the first wafer; a second joining step of joining the second wafer having the plurality of container recesses provided on the one main surface to the crystal wafer with the container recesses toward the crystal wafer; and an individuating step of dividing the crystal wafer into individual crystal vibrators. <P>COPYRIGHT: (C)2011,JPO&INPIT |
