| 发明名称 |
SUBSTRATE PLASMA-PROCESSING APPARATUS |
| 摘要 |
A substrate plasma-processing apparatus for plasma-processing a surface of an electrode of an organic light emitting device. The substrate plasma-processing apparatus may adjust the distance between a first electrode and a substrate and adjust the distance between a second electrode and the substrate. |
| 申请公布号 |
US2010282709(A1) |
申请公布日期 |
2010.11.11 |
| 申请号 |
US20100774846 |
申请日期 |
2010.05.06 |
| 申请人 |
SAMSUNG MOBILE DISPLAY CO., LTD. |
发明人 |
KANG TAE-WOOK;KIM OU-HYON;JI CHANG-SOON;CHO HYUN-LAE;AN CHANG-GUO;LEE JEONG-YEOL;PARK JAE-MORK |
| 分类号 |
B44C1/22;C23F1/08 |
主分类号 |
B44C1/22 |
| 代理机构 |
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| 主权项 |
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