| 摘要 |
PROBLEM TO BE SOLVED: To provide a pressure sensor, wherein stable temperature correction can be performed by an integrated circuit chip while suppressing an increase in manufacturing costs of a pressure sensor chip and size increase of the sensor. SOLUTION: The pressure sensor 1 includes a pressure sensor chip 2, an integrated circuit chip 3, a package 4, and oil 5 as a pressure transmitting medium. The pressure sensor chip 2 detects the pressure of fluid 14, and the integrated circuit chip 3 performs temperature correction of the detection value detected by the pressure sensor chip 2. The package 4 is formed into a box shape and contains the chips 2, 3. An pressure introduction hole 4c is arranged through an internal surface, opposite to the pressure sensor chip 2 in the package 4. The oil 5 is filled in the pressure inlet hole 4c and transmits the pressure of the fluid 14 to the pressure sensor chip 2. Since the specific heat of the material of the package 4 is substantially equal to that of the oil 5, even if the temperature of the fluid 14 is different by a large amount from the ambient temperature of the surroundings, stable temperature correction can be performed by the integrated circuit chip 3, while increase in the manufacturing cost of the pressure sensor chip 2 and size increase of the same is suppressed. COPYRIGHT: (C)2011,JPO&INPIT |
