| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a thermal treatment system, capable of reducing the capacity of power equipment for supplying power to a thermal treatment device having reactors for heat-treating a plurality of boards collectively. <P>SOLUTION: The thermal treatment system has n reactors, performing thermal treatment to the substrate (n is an integer of ≥2), wherein m first power converters 2a, 2b are prepared for converting three-phase AC power into DC power (m is an integer ≥2) and second power converters 41-43 are connected to these first power converters 2a, 2b, to supply power to a heater of each reactor. Controllers 5a, 5b controls the sequence of operation of each reactor so that the sum of the consumed powers in heaters 14-16 of the n reactors does not exceed the sum of maximum outputs in the m first power converters 2a, 2b. <P>COPYRIGHT: (C)2011,JPO&INPIT |
