| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a charged particle beam drawing method and a device which reflect beam current density and exposure amount tolerance on an edge of a cross section of a variable beam on determination of an exposure amount, and to improve line width linearity of a resist pattern formed on a material to be drawn. <P>SOLUTION: A beam current is measured by a current detection part 17 while changing a beam cross section dimension by a forming deflector 12. Beam current density distribution is obtained from the beam current and beam cross section. Based on the beam current density distribution, the beam current density on the edge of the beam cross section of each beam cross section dimension is determined. <P>COPYRIGHT: (C)2011,JPO&INPIT |
