| 摘要 |
PROBLEM TO BE SOLVED: To prevent the generation of air bubbles in an indirect medium, and to discharge fluid more accurately at a constant rate. SOLUTION: A rotary drive source 14 is disposed at an end of a housing 12, and at the other end of the housing 12, a pump head 16 is provided having a pump chamber 40 into which the fluid S is sucked and a filling chamber 32 filled with the indirect medium 30. Furthermore, a displacement mechanism 18 having a displacement nut 28 which is displaced by the drive action of the rotary drive source 14 is disposed in the housing 12. A bellows 58 is interposed between a tubular body 54 connected to the displacement nut 28 and a first block 34 of the pump head 16 where the interior of the bellows is filled with the indirect medium 30 which is formed of an incompressible fluid. Furthermore, a diaphragm 38 is disposed flexibly in the pump head 16 between the fluid S and the indirect medium 30. COPYRIGHT: (C)2011,JPO&INPIT |
