| 摘要 |
PROBLEM TO BE SOLVED: To provide a high-density substrate storage device which is a wire cassette type having higher substrate storage efficiency than a cross-bar type and a back-support type, and is increased in storage efficiency as compared with a conventional wire cassette type. SOLUTION: The substrate storage device which stores and holds a plurality of substrates by taking substrates out and in from a front side includes a mechanism which has a plurality of stages of wire arrays constituted by tensing and arraying a plurality of wires for mounting substrates horizontally, and varying tension of the wires, the substrates being taken out and in by varying the tension of the wires in units of wire arrays. COPYRIGHT: (C)2011,JPO&INPIT |
