发明名称 INSULATING THIN FILM, AND THIN-FILM TRANSISTOR USING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide an insulating film having a liquid form and capable of easily forming a thin film by handling and solution application, and usable for a passivation film, a gate insulating film or the like of an electronic component requiring a high insulation property in a low baking temperature condition, for instance, a thin-film transistor. SOLUTION: In a thin film formable by applying a solution of a resin composition, and obtained by post bake below 170°C, the problem can be solved by this insulating thin film having a calorific value≤5 J/g by DSC measurement. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2010258378(A) 申请公布日期 2010.11.11
申请号 JP20090109903 申请日期 2009.04.28
申请人 KANEKA CORP 发明人 IDE MASAHITO;MANABE TAKAO
分类号 H01L21/312;H01L29/786 主分类号 H01L21/312
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