发明名称 X-RAY SPATIAL MODULATOR AND X-RAY EXPOSURE APPARATUS
摘要 <P>PROBLEM TO BE SOLVED: To provide an X-ray spatial modulator which achieves minute strength modulation in a two-dimensional space of an X-ray beam by electric manipulation. <P>SOLUTION: The X-ray spatial modulator 1 includes an X-ray modulation means 10 where spin injection magnetization reversal elements (hereinafter, the "ELEMENTS") 5 whose magnetization directions are reversed by spin injection are arranged two-dimensionally, an element selection means 11 for selecting the ELEMENTS 5 reversing their magnetization direction among the two-dimensionally arranged ELEMENTS 5 and a magnetization reversal current injection means 12 for reversing the magnetization direction of the ELEMENTS 5 by injecting a magnetization reversal current for conducting magnetization reversal into the ELEMENTS 5 selected by the element selection means 11. The X-ray spatial modulator 1 modulates the strength distribution in a two-dimensional space of a monochrome circularly-polarized X-ray beam B2 incident into the ELEMENTS 5 and permeating the ELEMENTS 5 through the variation of the absorption ratio of the ELEMENTS 5 to the monochrome circularly-polarized X-ray beam B2 by controlling the magnetization direction of each of the ELEMENTS 5 with the element selection means 11. <P>COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2010256305(A) 申请公布日期 2010.11.11
申请号 JP20090109915 申请日期 2009.04.28
申请人 NIPPON HOSO KYOKAI <NHK> 发明人 SATO SHIRO;FUNABASHI NOBUHIKO;AOSHIMA KENICHI;MACHIDA KENJI;MIYAMOTO YASUYOSHI;KAWAMURA KIICHI;KUGA ATSUSHI;SHIMIZU NAOKI
分类号 G21K3/00;G03F1/22;G03F1/24;G21K1/00;G21K1/087;H01L21/027;H01L29/82;H01L43/08 主分类号 G21K3/00
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