发明名称 Bump Pad Structure
摘要 An embodiment is a bump bond pad structure that comprises a substrate comprising a top layer, a reinforcement pad disposed on the top layer, an intermediate layer above the top layer, an intermediate connection pad disposed on the intermediate layer, an outer layer above the intermediate layer, and an under bump metal (UBM) connected to the intermediate connection pad through an opening in the outer layer. Further embodiments may comprise a via mechanically coupling the intermediate connection pad to the reinforcement pad. The via may comprise a feature selected from the group consisting of a solid via, a substantially ring-shaped via, or a five by five array of vias. Yet, a further embodiment may comprise a secondary reinforcement pad, and a second via mechanically coupling the reinforcement pad to the secondary reinforcement pad.
申请公布号 US2010283148(A1) 申请公布日期 2010.11.11
申请号 US20100726449 申请日期 2010.03.18
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. 发明人 TSAI HAO-YI;CHEN HSIEN-WEI;LIU YU-WEN;CHEN YING-JU;WEI HSIU-PING
分类号 H01L23/485;H01L21/60 主分类号 H01L23/485
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