| 摘要 |
PROBLEM TO BE SOLVED: To provide a micro-mirror mechanism that correctly reflects light in a desired direction. SOLUTION: A cover glass 200 is a flat cuboid, and a photosensing member is formed on a bottom surface 202 of the cover glass by vapor depositing CdS. The photosensing member is composed of first to sixth X-direction photosensing parts PDx1-PDx6, and first to sixth Y-direction photosensing parts PDy1-PDy6. On the cover glass bottom surface 202, the first micro-mirror mechanism 10 is controlled so that a first moving section 120 reflects a laser beam from between the first Y-direction photosensing part PDy1 and the second Y-direction photosensing part PDy2 to between the fifth Y-direction photosensing part PDy5 and the sixth Y direction photosensing part PDy6; and that a second moving section 130 reflects the laser beam, from between the first X-direction photosensing part PDx1 and the second X-direction photosensing part PDx2 to between the fifth X-direction photosensing part PDx5 and the sixth X-direction photosensing part PDx6. COPYRIGHT: (C)2011,JPO&INPIT |
