| 摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray analyzer quickly and precisely applying X rays to a sample and desired positions of the sample. SOLUTION: The X-ray analyzer 100 includes: a light-concentrating device 2 for forming an X-ray microbeam 3; an observation camera 10 for observing a sample surface including a minute irradiation point irradiated with the X-ray microbeam; an X-ray detector 9 for detecting the X-ray microbeam generated from the minute irradiation point; a rotary stage 4 for mounting a sample; a first translational drive stage 6 placed on the rotary stage; a second translational drive stage 5, where the rotary stage is placed at an upper portion; a first position adjusting device for mounting the camera for observation; and a second position adjusting device for mounting X-ray detectors. The X-ray analyzer includes a substrate 7, namely a tentative sample of a sample for measurement, which is disposed so that the minute irradiation point is positioned on the surface. The substrate includes a minute line pattern having density differing from that of the substrate on the surface. COPYRIGHT: (C)2011,JPO&INPIT |
